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Hisao Izawa
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Kawasaki, JP
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last 30 patents
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Patent Grant
Method of and apparatus for measuring pattern positions
Patent number
5,539,521
Issue date
Jul 23, 1996
Nikon Corporation
Taro Otokake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of and apparatus for measuring pattern positions
Patent number
5,459,577
Issue date
Oct 17, 1995
Nikon Corporation
Taro Ototake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Small gap measuring apparatus
Patent number
4,685,805
Issue date
Aug 11, 1987
Nippon Kogaku K.K.
Kenichi Kodama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for aligning mask and wafer used in semiconductor circuit...
Patent number
4,636,626
Issue date
Jan 13, 1987
Nippon Kogaku K.K.
Junji Hazama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask feed method and apparatus for exposure replicate systems
Patent number
4,598,242
Issue date
Jul 1, 1986
Nippon Kogaku K.K.
Yutaka Hayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for the attitude control of plate-form body
Patent number
4,537,501
Issue date
Aug 27, 1985
Nippon Kogaku K.K.
Yukio Kakizaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY