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Hisao Nishizawa
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Inugami, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of and an apparatus for processing a substrate
Patent number
5,888,344
Issue date
Mar 30, 1999
Dainippon Screen Mfg. Co., Ltd.
Nobutoshi Ogami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holder
Patent number
5,704,493
Issue date
Jan 6, 1998
Dainippon Screen Mfg. Co., Ltd.
Kazunori Fujikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning method and apparatus therefore
Patent number
5,288,333
Issue date
Feb 22, 1994
Dainippon Screen Mfg. Co., Ltd.
Masato Tanaka
B08 - CLEANING
Information
Patent Grant
Apparatus and system for treating surface of a wafer by dipping the...
Patent number
5,275,184
Issue date
Jan 4, 1994
Dainippon Screen Mfg. Co., Ltd.
Hisao Nishizawa
B08 - CLEANING
Information
Patent Grant
Wafer cleaning method and apparatus therefor
Patent number
5,158,100
Issue date
Oct 27, 1992
Dainippon Screen Mfg. Co., Ltd.
Masato Tanaka
B08 - CLEANING
Information
Patent Grant
Method and apparatus for surface treating of substrates
Patent number
4,871,417
Issue date
Oct 3, 1989
Dainippon Screen Mfg. Co., Ltd.
Hisao Nishizawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for washing opposite surfaces of a substrate
Patent number
4,811,443
Issue date
Mar 14, 1989
Dainippon Screen Mfg. Co., Ltd.
Hisao Nishizawa
B08 - CLEANING
Information
Patent Grant
Method of surface treatment
Patent number
4,569,717
Issue date
Feb 11, 1986
Dainippon Screen Mfg. Co., Ltd.
Nobutoshi Ohgami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Substrate holding apparatus
Publication number
20030178379
Publication date
Sep 25, 2003
Dainippon Screen Mfg. Co., Ltd.
Koji Hasegawa
H01 - BASIC ELECTRIC ELEMENTS