Hisao YASUNAMI

Person

  • Tokyo, JP

Patents Applicationslast 30 patents

  • Information Patent Application

    DRY ETCHING METHOD

    • Publication number 20160307765
    • Publication date Oct 20, 2016
    • Hitachi High-Technologies Corporation
    • Ze SHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DRY ETCHING METHOD

    • Publication number 20150099368
    • Publication date Apr 9, 2015
    • Hitachi High-Technologies Corporation
    • Ze SHEN
    • H01 - BASIC ELECTRIC ELEMENTS