Hisashi Aida

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Narita, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and apparatus
- Patent number 6,852,626
- Issue date Feb 8, 2005
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition method and apparatus
- Patent number 6,593,252
- Issue date Jul 15, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus for semiconductor devices
- Patent number 6,576,567
- Issue date Jun 10, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition method and apparatus
- Patent number 6,488,984
- Issue date Dec 3, 2002
- Applied Materials Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering reactor and method of using an unbalanced magnetron
- Patent number 6,440,282
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Yuichi Wada
- H01 - BASIC ELECTRIC ELEMENTS