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Koshi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming insulating film, apparatus for processing substr...
Patent number
11,823,897
Issue date
Nov 21, 2023
Tokyo Electron Limited
Makoto Muramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Insulating film forming method, insulating film forming device, and...
Patent number
11,631,581
Issue date
Apr 18, 2023
Tokyo Electron Limited
Makoto Muramatsu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Computer storage medium to perform a substrate treatment method usi...
Patent number
11,574,812
Issue date
Feb 7, 2023
Tokyo Electron Limited
Makoto Muramatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming insulating film, apparatus for processing substr...
Patent number
11,315,784
Issue date
Apr 26, 2022
Tokyo Electron Limited
Makoto Muramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and computer storage medium
Patent number
10,586,711
Issue date
Mar 10, 2020
Tokyo Electron Limited
Makoto Muramatsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment method using a block copolymer containing a hyd...
Patent number
10,418,242
Issue date
Sep 17, 2019
Tokyo Electron Limited
Makoto Muramatsu
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Substrate treatment method, computer storage medium and substrate t...
Patent number
10,329,144
Issue date
Jun 25, 2019
Tokyo Electron Limited
Makoto Muramatsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of topography to direct assembly of block copolymers in grapho-...
Patent number
9,418,860
Issue date
Aug 16, 2016
Tokyo Electron Limited
Mark H. Somervell
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
Publication number
20240027923
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Tomoya ONITSUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...
Publication number
20220208547
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Makoto Muramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...
Publication number
20210159074
Publication date
May 27, 2021
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Insulating Film Forming Method, Insulating Film Forming Device, and...
Publication number
20200211838
Publication date
Jul 2, 2020
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
Publication number
20190341255
Publication date
Nov 7, 2019
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND COMPUTER STORAGE MEDIUM
Publication number
20180269072
Publication date
Sep 20, 2018
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
Publication number
20180065843
Publication date
Mar 8, 2018
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND SUBSTRATE T...
Publication number
20170287749
Publication date
Oct 5, 2017
TOKYO ELECTRON LIMITED
Makoto MURAMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USE OF TOPOGRAPHY TO DIRECT ASSEMBLY OF BLOCK COPOLYMERS IN GRAPHO-...
Publication number
20150111387
Publication date
Apr 23, 2015
TOKYO ELECTRON LIMITED
Mark H. Somervell
H01 - BASIC ELECTRIC ELEMENTS