Hisashi Hashiguchi

Person

Mie, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Gas supply member, plasma processing apparatus, and method for form...
- Patent number 11,164,726
- Issue date Nov 2, 2021
- TOSHIBA MEMORY CORPORATION
- Tetsuyuki Matsumoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD FOR FORM...
- Publication number 20200258719
- Publication date Aug 13, 2020
- Toshiba Memory Corporation
- Tetsuyuki MATSUMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...
- Publication number 20140231251
- Publication date Aug 21, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hisashi Hashiguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...
- Publication number 20140217891
- Publication date Aug 7, 2014
- KABUSHIKI KAISHA TOSHIBA
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING DEVICE AND FOCUS RING
- Publication number 20130168020
- Publication date Jul 4, 2013
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS
- Publication number 20120247667
- Publication date Oct 4, 2012
- Kabushiki Kaisha Toshiba
- Hisashi HASHIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20120216955
- Publication date Aug 30, 2012
- TOSHIBA MATERIALS CO., LTD.
- Hideo ETO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hisashi Hashiguchi

Person

Patents Grantslast 30 patents

Gas supply member, plasma processing apparatus, and method for form...

Patents Applicationslast 30 patents

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS, AND METHOD FOR FORM...

GAS SUPPLY MEMBER, PLASMA PROCESSING APPARATUS AND METHOD OF FABRIC...

ELECTRODE FOR PLASMA PROCESSING APPARATUS, METHOD FOR MANUFACTURING...

ETCHING DEVICE AND FOCUS RING

PLASMA TREATMENT APPARATUS

PLASMA PROCESSING APPARATUS