Hisashi HIGUCHI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device and method of forming...
- Patent number 10,734,221
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Taiki Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
THERMAL ETCHING OF RUTHENIUM
- Publication number 20240153781
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Hisashi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND METHOD OF FORMING...
- Publication number 20190013195
- Publication date Jan 10, 2019
- TOKYO ELECTRON LIMITED
- Taiki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Planarizing Graphene Layer
- Publication number 20180226252
- Publication date Aug 9, 2018
- TOKYO ELECTRON LIMITED
- Ryota IFUKU
- H01 - BASIC ELECTRIC ELEMENTS