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Hisashi Hirose
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
10,714,355
Issue date
Jul 14, 2020
Tokyo Electron Limited
Hiroki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
10,438,774
Issue date
Oct 8, 2019
Tokyo Electron Limited
Hayato Hishinuma
C30 - CRYSTAL GROWTH
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Patent Grant
Plasma etching method and plasma etching apparatus
Patent number
7,456,111
Issue date
Nov 25, 2008
Tokyo Electron Limited
Hisashi Hirose
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SHOWER HEAD AND PLASMA PROCESSING APPARATUS
Publication number
20220403518
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Hisashi HIROSE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20200294773
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Hayato Hishinuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS
Publication number
20190006186
Publication date
Jan 3, 2019
TOKYO ELECTRON LIMITED
Hiroki Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20180158654
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Hayato HISHINUMA
C30 - CRYSTAL GROWTH
Information
Patent Application
Plasma etching method and plasma etching apparatus
Publication number
20060102589
Publication date
May 18, 2006
TOKYO ELECTRON LIMITED
Hisashi Hirose
H01 - BASIC ELECTRIC ELEMENTS