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Processing apparatus for substrates
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Patent number 5,980,684
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Issue date Nov 9, 1999
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Tokyo Ohka Co., Ltd.
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Hisashi Hori
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Issue date Dec 8, 1998
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Tokyo Ohka Kogyo Co., Ltd.
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Hisashi Hori
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H01 - BASIC ELECTRIC ELEMENTS
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Heating apparatus
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Patent number 5,332,557
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Issue date Jul 26, 1994
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Tokyo Ohka Kogyo Co., Ltd.
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Tsutomu Sahoda
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G05 - CONTROLLING REGULATING