Hisashi KAWANO

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,087,992
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Tsukasa Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,075,096
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,923,368
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
- Patent number 10,792,711
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Meitoku Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,651,061
- Issue date May 12, 2020
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system, substrate cleaning method, and recordi...
- Patent number 10,272,478
- Issue date Apr 30, 2019
- Tokyo Electron Limited
- Meitoku Aibara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,192,758
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,121,646
- Issue date Nov 6, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chemical fluid processing apparatus and chemical fluid processing m...
- Patent number 10,062,586
- Issue date Aug 28, 2018
- Tokyo Electron Limited
- Derek W Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 9,953,840
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus having nozzle with multiple f...
- Patent number 9,922,849
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,870,914
- Issue date Jan 16, 2018
- Tokyo Electron Limited
- Koji Kagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method and recording medium
- Patent number 9,818,598
- Issue date Nov 14, 2017
- Tokyo Electron Limited
- Meitoku Aibara
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 9,805,957
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,378,940
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating/developing apparatus and pattern forming method
- Patent number 7,924,396
- Issue date Apr 12, 2011
- Tokyo Electron Limited
- Hisashi Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335621
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200251343
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20200152489
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190148183
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
- Publication number 20190118227
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122905
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190096710
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190096711
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180082831
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180012781
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20170186620
- Publication date Jun 29, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Marumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170040154
- Publication date Feb 9, 2017
- TOKYO ELECTRON LIMITED
- Koji KAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20170011907
- Publication date Jan 12, 2017
- TOKYO ELECTRON LIMITED
- Kazuyuki Mitsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...
- Publication number 20160035561
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM
- Publication number 20160035564
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Meitoku AIBARA
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150318183
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Yasuyuki Ido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical Fluid Processing Apparatus and Chemical Fluid Processing M...
- Publication number 20150031214
- Publication date Jan 29, 2015
- TOKYO ELECTRON LIMITED
- Derek W Bassett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20140377463
- Publication date Dec 25, 2014
- Yosuke Hachiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20140360536
- Publication date Dec 11, 2014
- Yosuke Kawabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130340796
- Publication date Dec 26, 2013
- Hisashi Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130284213
- Publication date Oct 31, 2013
- TOKYO ELECTRON LIMITED
- Yosuke Hachiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20120328273
- Publication date Dec 27, 2012
- Hisashi KAWANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING/DEVELOPING APPARATUS AND PATTERN FORMING METHOD
- Publication number 20080204675
- Publication date Aug 28, 2008
- TOKYO ELECTRON LIMITED
- Hisashi Kawano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hisashi KAWANO

Person

Patents Grantslast 30 patents

Substrate processing apparatus, substrate processing method and rec...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, substrate processing method, and st...

Substrate processing system, substrate cleaning method, and recordi...

Substrate processing apparatus, substrate processing method and rec...

Substrate processing system, substrate cleaning method, and recordi...

Substrate processing apparatus

Substrate processing apparatus and substrate processing method

Chemical fluid processing apparatus and chemical fluid processing m...

Substrate processing method and substrate processing system

Substrate liquid processing apparatus having nozzle with multiple f...

Substrate processing apparatus and substrate processing method

Substrate cleaning method and recording medium

Substrate processing apparatus, substrate processing method and com...

Substrate processing apparatus and substrate processing method

Coating/developing apparatus and pattern forming method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE CLEANING METHOD, AND RECORDI...

SUBSTRATE CLEANING METHOD AND RECORDING MEDIUM

SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...

Chemical Fluid Processing Apparatus and Chemical Fluid Processing M...

LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

COATING/DEVELOPING APPARATUS AND PATTERN FORMING METHOD