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Hisashi Kijima
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Gunma, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for producing semiconductor wafer and semiconductor wafer
Patent number
7,507,146
Issue date
Mar 24, 2009
Shin-Etsu Handotai Co., Ltd.
Tadahiro Kato
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Method for Producing Semiconductor Wafer and Semiconductor Wafer
Publication number
20080096474
Publication date
Apr 24, 2008
SHIN-ETSU HANDOTAI CO., LTD.
Tadahiro Kato
B24 - GRINDING POLISHING