Hisashi Kikuchi

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Patents Grantslast 30 patents

Information Patent Grant
Processing method and processing unit for substrate
- Patent number 6,231,290
- Issue date May 15, 2001
- Tokyo Electron
- Hisashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Notch alignment apparatus and adjustment jig for the same
- Patent number 5,970,818
- Issue date Oct 26, 1999
- Tokyo Electron Limited
- Hisashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for detecting objects to be transferred for use in semico...
- Patent number 5,780,849
- Issue date Jul 14, 1998
- Tokyo Electron, Ltd.
- Hisashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for transferring plate-like objects
- Patent number 5,655,871
- Issue date Aug 12, 1997
- Tokyo Electron Limited
- Katsumi Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method and device
- Patent number 5,645,419
- Issue date Jul 8, 1997
- Tokyo Electron Kabushiki Kaisha
- Tetsu Ohsawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for transferring plate-like objects
- Patent number 5,562,387
- Issue date Oct 8, 1996
- Tokyo Electron Limited
- Katsumi Ishii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Processing method and processing unit for substrate
- Publication number 20010005476
- Publication date Jun 28, 2001
- Hisashi Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS