Hisashi Nishinaga

Person

Tokiwa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 10,025,194
- Issue date Jul 17, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 9,513,558
- Issue date Dec 6, 2016
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,749,759
- Issue date Jun 10, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,305,552
- Issue date Nov 6, 2012
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical apparatus, exposure apparatus and device manuf...
- Patent number 8,223,318
- Issue date Jul 17, 2012
- Nikon Corporation
- Kouji Muramatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing device
- Patent number 8,139,198
- Issue date Mar 20, 2012
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,515,247
- Issue date Apr 7, 2009
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,515,248
- Issue date Apr 7, 2009
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure metho...
- Patent number 7,423,731
- Issue date Sep 9, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method capable of controlling illum...
- Patent number 6,927,836
- Issue date Aug 9, 2005
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method capable of controlling illum...
- Patent number 6,771,350
- Issue date Aug 3, 2004
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180348643
- Publication date Dec 6, 2018
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20170082925
- Publication date Mar 23, 2017
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE
- Publication number 20140240685
- Publication date Aug 28, 2014
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus, Exposure Method, and Method for Producing Device
- Publication number 20130027682
- Publication date Jan 31, 2013
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD
- Publication number 20120236285
- Publication date Sep 20, 2012
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20100225895
- Publication date Sep 9, 2010
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20100149511
- Publication date Jun 17, 2010
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...
- Publication number 20090086186
- Publication date Apr 2, 2009
- Nikon Corporation
- Kouji MURAMATSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSING METHOD, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD
- Publication number 20090046266
- Publication date Feb 19, 2009
- Nikon Corporation
- Hisashi NISHINAGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080239274
- Publication date Oct 2, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080094602
- Publication date Apr 24, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20080074632
- Publication date Mar 27, 2008
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20080042068
- Publication date Feb 21, 2008
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060181690
- Publication date Aug 17, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, and method for producing device
- Publication number 20060170891
- Publication date Aug 3, 2006
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system, exposure apparatus, and exposure method
- Publication number 20060055834
- Publication date Mar 16, 2006
- Nikon Corporation
- Osamu Tanitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method capable of controlling illum...
- Publication number 20040239904
- Publication date Dec 2, 2004
- Nikon Corporation
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method capable of controlling illum...
- Publication number 20030025890
- Publication date Feb 6, 2003
- NIKON CORPORATION
- Hisashi Nishinaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hisashi Nishinaga

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Illuminating optical apparatus, exposure apparatus and device manuf...

Exposure apparatus, exposure method, and method for producing device

Illumination optical system, exposure apparatus, and exposure metho...

Illumination optical system, exposure apparatus, and exposure metho...

Illumination optical system, exposure apparatus, and exposure metho...

Exposure apparatus and exposure method capable of controlling illum...

Exposure apparatus and exposure method capable of controlling illum...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE

Exposure Apparatus, Exposure Method, and Method for Producing Device

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

ILLUMINATING OPTICAL APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUF...

EXPOSING METHOD, EXPOSING DEVICE, AND DEVICE MANUFACTURING METHOD

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

Illumination optical system, exposure apparatus, and exposure method

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Exposure apparatus, exposure method, and method for producing device

Illumination optical system, exposure apparatus, and exposure method

Exposure apparatus and exposure method capable of controlling illum...

Exposure apparatus and exposure method capable of controlling illum...