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Hisashi Nomura
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing semiconductor device and substrate processi...
Patent number
9,023,429
Issue date
May 5, 2015
Hitachi Kokusai Electric Inc.
Yuichiro Takeshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing semiconductor device, substrate treatment...
Patent number
6,821,871
Issue date
Nov 23, 2004
Hitachi Kokusai Electric Inc.
Hisashi Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
6,787,481
Issue date
Sep 7, 2004
Hitachi Kokusai Electric Inc.
Masayuki Asai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heat treatment of semiconductor wafers where upper heater directly...
Patent number
5,960,159
Issue date
Sep 28, 1999
Kokusai Electric Co., Ltd.
Fumihide Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
GAS CLEANING METHOD, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANU...
Publication number
20230294145
Publication date
Sep 21, 2023
Kokusai Electric Corporation
Takahiro KOBAYASHI
B08 - CLEANING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
Publication number
20130078823
Publication date
Mar 28, 2013
Hitachi Kokusai Electric Inc.
Yuichiro Takeshima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate Processing Apparatus and Substrate Processing Method
Publication number
20120305026
Publication date
Dec 6, 2012
Hitachi Kokusai Electric Inc.
Hisashi Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20040009678
Publication date
Jan 15, 2004
Hitachi Kokusai Electric Inc.
Masayuki Asai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for manufacturing semiconductor device, substrate treatment...
Publication number
20020016051
Publication date
Feb 7, 2002
HITACHI KOKUSAI ELECTRIC INC.
Hisashi Nomura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...