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Hisashi Shiozawa
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Yokohama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for point diffraction interferometry
Patent number
6,963,408
Issue date
Nov 8, 2005
Nikon Corporation
Mikihiko Ishii
G01 - MEASURING TESTING
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Patent Grant
Method for measuring interference and apparatus for measuring inter...
Patent number
6,940,605
Issue date
Sep 6, 2005
Nikon Corporation
Jun Kawakami
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for point diffraction interferometry
Publication number
20040252311
Publication date
Dec 16, 2004
Nikon Corporation
Mikihiko Ishii
G01 - MEASURING TESTING
Information
Patent Application
Method for measuring interference and apparatus for measuring inter...
Publication number
20030174342
Publication date
Sep 18, 2003
Jun Kawakami
G01 - MEASURING TESTING