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Hisashi Takamizawa
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Tokyo, JP
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last 30 patents
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Patent Grant
Method for stabilizing plasma ignition
Patent number
8,742,668
Issue date
Jun 3, 2014
ASM IP Holdings B.V.
Ryu Nakano
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method for Stabilizing Plasma Ignition
Publication number
20140062304
Publication date
Mar 6, 2014
ASM IP HOLDING B.V.
Ryu Nakano
H01 - BASIC ELECTRIC ELEMENTS