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Hisashi Tazawa
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Ageo, JP
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last 30 patents
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Patent Grant
System and method for measuring displacement of a stage
Patent number
7,283,200
Issue date
Oct 16, 2007
Nikon Corporation
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
System and method for measuring displacement of a stage
Publication number
20050012918
Publication date
Jan 20, 2005
Alex Ka Tim Poon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY