TREA

Hisashi Tsukazaki

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  • Tokyo, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Semiconductor manufacturing apparatus
    • Patent number 5,837,094
    • Issue date Nov 17, 1998
    • Mitsubishi Denki Kabushiki Kaisha
    • Hisashi Tsukazaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Thin film deposition apparatus
    • Patent number 5,525,158
    • Issue date Jun 11, 1996
    • Mitsubishi Denki Kabushiki Kaisha
    • Hisashi Tsukazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus for and method of forming thin film
    • Patent number 5,211,994
    • Issue date May 18, 1993
    • Mitsubishi Denki Kabubshiki Kaisha
    • Hisashi Tsukazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cluster beam thin film deposition apparatus with thermionic electro...
    • Patent number 5,099,791
    • Issue date Mar 31, 1992
    • Mitsubishi Denki Kabushiki Kaisha
    • Hisashi Tsukazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Evaporation source with a shaped nozzle
    • Patent number 4,812,326
    • Issue date Mar 14, 1989
    • Mitsubishi Denki Kabushiki Kaisha
    • Hisashi Tsukazaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...