Hisashi Yanagida

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck support mechanism, support stand device and pla...
- Patent number 6,977,804
- Issue date Dec 20, 2005
- Mitsubishi Heavy Industries, Ltd.
- Hisashi Yanagida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE SUPPORT TABLE OF PLASMA PROCESSING DEVICE
- Publication number 20120002345
- Publication date Jan 5, 2012
- Mitsubishi Heavy Industries, Ltd.
- Hidetaka Kafuku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT STAGE OF PLASMA PROCESSING APPARATUS
- Publication number 20110297321
- Publication date Dec 8, 2011
- Mitsubishi Heavy Industries, Ltd.
- Ryuichi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...