Hisashl Aida

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Narita, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film deposition method and apparatus for semiconductor devices
- Patent number 6,511,538
- Issue date Jan 28, 2003
- Applied Materials, Inc.
- Yuichi Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...