Hisato Nakamura

Person

Saitama-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of detecting defects on an object
- Patent number 7,940,383
- Issue date May 10, 2011
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,692,779
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,639,350
- Issue date Dec 29, 2009
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,443,496
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,098,055
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,037,735
- Issue date May 2, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of inspecting foreign particle or defect on a...
- Patent number 6,597,448
- Issue date Jul 22, 2003
- Hitachi, Ltd.
- Hidetoshi Nishiyama
- G01 - MEASURING TESTING
Information Patent Grant
Optical apparatus for defect and particle size inspection
- Patent number 6,411,377
- Issue date Jun 25, 2002
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 6,365,425
- Issue date Apr 2, 2002
- Hitachi, Ltd.
- Masami Ikota
- G01 - MEASURING TESTING
Information Patent Grant
Surface defect inspection device and shading correction method ther...
- Patent number 5,880,828
- Issue date Mar 9, 1999
- Hitachi Electronics Engineering Co., Ltd.
- Hisato Nakamura
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection apparatus for patterned wafer
- Patent number 5,818,576
- Issue date Oct 6, 1998
- Hitachi Electronics Engineering Co., Ltd.
- Yoshio Morishige
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection apparatus for patterned wafer
- Patent number 5,724,132
- Issue date Mar 3, 1998
- Hitachi Electronics Engineering Co., Ltd.
- Yoshio Morishige
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and apparatus
- Patent number 5,694,214
- Issue date Dec 2, 1997
- Hitachi Electronics Engineering Co., Ltd.
- Tetsuya Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection method and apparatus
- Patent number 5,644,393
- Issue date Jul 1, 1997
- Hitachi Electronics Engineering Co., Ltd.
- Hisato Nakamura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus And Method For Testing Defects
- Publication number 20100088042
- Publication date Apr 8, 2010
- Minori NOGUCHI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146696
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146697
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030060
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030059
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20020168787
- Publication date Nov 14, 2002
- Minori Noguchi
- B82 - NANO-TECHNOLOGY

Hisato Nakamura

Person

Patents Grantslast 30 patents

Method of detecting defects on an object

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method of inspecting foreign particle or defect on a...

Optical apparatus for defect and particle size inspection

Method of manufacturing semiconductor device

Surface defect inspection device and shading correction method ther...

Extraneous substance inspection apparatus for patterned wafer

Extraneous substance inspection apparatus for patterned wafer

Surface inspection method and apparatus

Extraneous substance inspection method and apparatus

Patents Applicationslast 30 patents

Apparatus And Method For Testing Defects

APPARATUS AND METHOD FOR TESTING DEFECTS

APPARATUS AND METHOD FOR TESTING DEFECTS

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects