Membership
Tour
Register
Log in
Hisato Tanaka
Follow
Person
Yamanashi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method of maintaining and automatically inspecting processing appar...
Patent number
7,555,406
Issue date
Jun 30, 2009
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of self-diagnosing software for driving processing apparatus
Patent number
7,386,423
Issue date
Jun 10, 2008
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of automatically resetting processing apparatus
Patent number
6,954,716
Issue date
Oct 11, 2005
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation system using optimum magnetic field for concentrat...
Patent number
5,306,921
Issue date
Apr 26, 1994
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source device
Patent number
5,296,713
Issue date
Mar 22, 1994
Tokyo Electron Limited
Hisato Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of maintaining and automatically inspecting processing appar...
Publication number
20050090927
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods of self-diagnosing software for driving processing apparatus
Publication number
20050090926
Publication date
Apr 28, 2005
TOKYO ELECTRON LIMITED
Hisato Tanaka
G05 - CONTROLLING REGULATING
Information
Patent Application
Method for maintaining processor, method of automatically inspectin...
Publication number
20030182084
Publication date
Sep 25, 2003
Hisato Tanaka
G05 - CONTROLLING REGULATING