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Hisatsugu Shirai
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Kawasaki, JP
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Patents Grants
last 30 patents
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Patent Grant
Fabrication method of a semiconductor device
Patent number
7,270,920
Issue date
Sep 18, 2007
Fujitsu Limited
Hisatsugu Shirai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Etching method for making a reticle
Patent number
7,226,866
Issue date
Jun 5, 2007
Fujitsu Limited
Hisatsugu Shirai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Fabrication method of a semiconductor device
Publication number
20060132776
Publication date
Jun 22, 2006
FUJITSU LIMITED
Hisatsugu Shirai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle manufacturing method
Publication number
20050266318
Publication date
Dec 1, 2005
FUJITSU LIMITED
Hisatsugu Shirai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY