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Kawasaki, JP
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last 30 patents
Information
Patent Grant
Method of providing changed particle beam exposure in which represe...
Patent number
5,965,895
Issue date
Oct 12, 1999
Fujitsu Limited
Takamasa Satoh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of and system for charged particle beam exposure
Patent number
5,721,432
Issue date
Feb 24, 1998
Fujitsu Limited
Takamasa Satoh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of and system for charged particle beam exposure
Patent number
5,719,402
Issue date
Feb 17, 1998
Fujitsu Limited
Takamasa Satoh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of and system for charged particle beam exposure
Patent number
5,546,319
Issue date
Aug 13, 1996
Fujitsu Limited
Takamasa Satoh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of and an apparatus for charged particle beam exposure
Patent number
5,404,018
Issue date
Apr 4, 1995
Fujitsu Limited
Hiroshi Yasuda
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged-particle beam exposure method
Patent number
5,399,872
Issue date
Mar 21, 1995
Fujitsu Limited
Hiroshi Yasuda
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam exposure method and apparatus
Patent number
5,382,800
Issue date
Jan 17, 1995
Fujitsu Limited
Hisayasu Nishino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam exposure including a heat blocking partition...
Patent number
5,338,939
Issue date
Aug 16, 1994
Fujitsu Limited
Hisayasu Nishino
H01 - BASIC ELECTRIC ELEMENTS