Hisayoshi Higashiguchi

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Itami, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mask inspection system and method of manufacturing semiconductor de...
- Patent number 6,327,021
- Issue date Dec 4, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Hisayoshi Higashiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for identifying photomask pattern defects
- Patent number 5,767,974
- Issue date Jun 16, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Hisayoshi Higashiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY