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Hisayuki Takesue
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Yokkaichi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for manufacturing trichlorosilane
Patent number
9,533,279
Issue date
Jan 3, 2017
Mitsubishi Materials Corporation
Noboru Tachino
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Process for producing hexachlorodisilane
Patent number
6,846,473
Issue date
Jan 25, 2005
Mitsubishi Materials Polycrystalline Silicon Corporation
Seiichi Kirii
C01 - INORGANIC CHEMISTRY
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for manufacturing trichlorosilane
Publication number
20090220403
Publication date
Sep 3, 2009
MITSUBISHI MATERIALS CORPORATION
Noboru Tachino
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Process for producing hexachlorodisilane
Publication number
20030147798
Publication date
Aug 7, 2003
MITSUBISHI MATERIALS CORP.
Seiichi Kirii
C01 - INORGANIC CHEMISTRY