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Hitomitsu Kambara
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Austin, TX, US
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last 30 patents
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Patent Grant
Method for treating a substrate
Patent number
7,268,084
Issue date
Sep 11, 2007
Tokyo Electron Limited
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method for treating a substrate
Publication number
20060065629
Publication date
Mar 30, 2006
TOKYO ELECTRON LIMITED
Lee Chen
H01 - BASIC ELECTRIC ELEMENTS