Hitoshi Atari

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck
- Patent number 6,643,115
- Issue date Nov 4, 2003
- Kyocera Corporation
- Katsushi Sakaue
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck
- Patent number 5,413,360
- Issue date May 9, 1995
- Kyocera Corporation
- Hitoshi Atari
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Electrostatic chuck
- Publication number 20020176219
- Publication date Nov 28, 2002
- Katsushi Sakaue
- H01 - BASIC ELECTRIC ELEMENTS