Hitoshi Hashima

Person

Kikuchi-gun, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 12,077,392
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hitoshi Hashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Operating method of processing liquid supply apparatus and recordin...
- Patent number 10,549,302
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Hitoshi Hashima
- G01 - MEASURING TESTING
Information Patent Grant
Processing liquid supply apparatus, operating method of processing...
- Patent number 9,943,871
- Issue date Apr 17, 2018
- Tokyo Electron Limited
- Hitoshi Hashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process liquid supply nozzle, process liquid supply device and nozz...
- Patent number 7,326,299
- Issue date Feb 5, 2008
- Tokyo Electron Limited
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20210347584
- Publication date Nov 11, 2021
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORT MEMBER, SUBSTRATE TREATMENT APPARATUS, AND SUBSTR...
- Publication number 20210173306
- Publication date Jun 10, 2021
- Tokyo Electron Limited
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING METHOD OF PROCESSING LIQUID SUPPLY APPARATUS AND RECORDIN...
- Publication number 20180193862
- Publication date Jul 12, 2018
- TOKYO ELECTRON LIMITED
- Hitoshi Hashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LIQUID SUPPLY APPARATUS, OPERATING METHOD OF PROCESSING...
- Publication number 20170087575
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi Hashima
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Process liquid supply nozzle, process liquid supply device and nozz...
- Publication number 20040173153
- Publication date Sep 9, 2004
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS

Hitoshi Hashima

Person

Patents Grantslast 30 patents

Substrate transfer apparatus and substrate transfer method

Operating method of processing liquid supply apparatus and recordin...

Processing liquid supply apparatus, operating method of processing...

Process liquid supply nozzle, process liquid supply device and nozz...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

SUBSTRATE SUPPORT MEMBER, SUBSTRATE TREATMENT APPARATUS, AND SUBSTR...

OPERATING METHOD OF PROCESSING LIQUID SUPPLY APPARATUS AND RECORDIN...

PROCESSING LIQUID SUPPLY APPARATUS, OPERATING METHOD OF PROCESSING...

Process liquid supply nozzle, process liquid supply device and nozz...