Hitoshi Higurashi

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,734,981
- Issue date Aug 15, 2017
- NuFlare Technology, Inc.
- Saori Gomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting overlapping figure, and charged...
- Patent number 8,280,632
- Issue date Oct 2, 2012
- Nuflare Technology, Inc.
- Shinji Sakamoto
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and proximity effect correc...
- Patent number 8,207,514
- Issue date Jun 26, 2012
- Nuflare Technology, Inc.
- Shigehiro Hara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,188,449
- Issue date May 29, 2012
- Nuflare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Data verification method, charged particle beam writing apparatus,...
- Patent number 7,949,966
- Issue date May 24, 2011
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged-particle beam pattern writing method and apparatus with a p...
- Patent number 7,786,453
- Issue date Aug 31, 2010
- Nuflare Technology, Inc.
- Shinji Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 7,750,324
- Issue date Jul 6, 2010
- Nuflare Technology, Inc.
- Susumu Oogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing error verification method of pattern writing apparatus and...
- Patent number 7,698,682
- Issue date Apr 13, 2010
- Nuflare Technology, Inc.
- Akihito Anpo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creation method and conversion method of charged particle beam writ...
- Patent number 7,592,611
- Issue date Sep 22, 2009
- Nuflare Technology, Inc.
- Jun Kasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming pattern writing data by using charged particle beam
- Patent number 7,504,645
- Issue date Mar 17, 2009
- Nuflare Technology, Inc.
- Akihito Anpo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged beam exposure system
- Patent number 6,566,662
- Issue date May 20, 2003
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure apparatus
- Patent number 6,319,642
- Issue date Nov 20, 2001
- Kabushiki Kaisha Toshiba
- Shigehiro Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged beam lithography system
- Patent number 6,313,476
- Issue date Nov 6, 2001
- Kabushiki Kaisha Toshiba
- Mitsuko Shimizu
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Manufacturing a circuit element
- Patent number 6,248,508
- Issue date Jun 19, 2001
- Kabushiki Kaisha Toshiba
- Ken-ichi Murooka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for generating exposure data for lithographic apparatus
- Patent number 6,047,116
- Issue date Apr 4, 2000
- Kabushiki Kaisha Toshiba
- Eiji Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Correlation tunnel device
- Patent number 5,679,961
- Issue date Oct 21, 1997
- Kabushiki Kaisha Toshiba
- Hitoshi Higurashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Single-electron tunnelling logic device
- Patent number 5,646,559
- Issue date Jul 8, 1997
- Kabushiki Kaisha Toshiba
- Hitoshi Higurashi
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20160300687
- Publication date Oct 13, 2016
- NuFlare Technology, Inc.
- Saori GOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...
- Publication number 20130032707
- Publication date Feb 7, 2013
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120286174
- Publication date Nov 15, 2012
- NuFlare Technology, Inc.
- Saori GOMI
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...
- Publication number 20110121208
- Publication date May 26, 2011
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...
- Publication number 20110068281
- Publication date Mar 24, 2011
- NuFlare Technology, Inc.
- Shigehiro HARA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20110012031
- Publication date Jan 20, 2011
- NuFlare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING OVERLAPPING FIGURE, AND CHARGED...
- Publication number 20090216450
- Publication date Aug 27, 2009
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20090057575
- Publication date Mar 5, 2009
- NuFlare Technology, Inc.
- Susumu OOGI
- B82 - NANO-TECHNOLOGY
Information Patent Application
DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...
- Publication number 20080221816
- Publication date Sep 11, 2008
- NuFlare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...
- Publication number 20080046787
- Publication date Feb 21, 2008
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS
- Publication number 20080023655
- Publication date Jan 31, 2008
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM
- Publication number 20070226675
- Publication date Sep 27, 2007
- NuFlare Technology, Inc.
- Akihito ANPO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...
- Publication number 20070053242
- Publication date Mar 8, 2007
- NuFlare Technology, Inc.
- Jun Kasahara
- B82 - NANO-TECHNOLOGY

Hitoshi Higurashi

Person

Patents Grantslast 30 patents

Charged particle beam writing apparatus and charged particle beam w...

Apparatus and method for inspecting overlapping figure, and charged...

Charged particle beam drawing apparatus and proximity effect correc...

Charged particle beam drawing method and apparatus

Data verification method, charged particle beam writing apparatus,...

Charged-particle beam pattern writing method and apparatus with a p...

Charged particle beam lithography apparatus and charged particle be...

Writing error verification method of pattern writing apparatus and...

Creation method and conversion method of charged particle beam writ...

Method of forming pattern writing data by using charged particle beam

Charged beam exposure system

Electron beam exposure apparatus

Charged beam lithography system

Manufacturing a circuit element

Method for generating exposure data for lithographic apparatus

Correlation tunnel device

Single-electron tunnelling logic device

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND ELECTRICAL CHARGING EFF...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...

CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS

APPARATUS AND METHOD FOR INSPECTING OVERLAPPING FIGURE, AND CHARGED...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...

DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...

WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...

CHARGED-PARTICLE BEAM PATTERN WRITING METHOD AND APPARATUS

METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM

CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...