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Hitoshi ITOH
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Film forming method and processing system
Patent number
9,266,146
Issue date
Feb 23, 2016
Tokyo Electron Limited
Kenji Matsumoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Microwave waveguide apparatus, plasma processing apparatus and plas...
Patent number
9,252,000
Issue date
Feb 2, 2016
National University Corporation Nagoya University
Hitoshi Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method, pretreatment device, and processing system
Patent number
8,865,590
Issue date
Oct 21, 2014
Tokyo Electron Limited
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
8,765,221
Issue date
Jul 1, 2014
Tokyo Electron Limited
Hidenori Miyoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma generating apparatus, plasma processing apparatus and plasma...
Patent number
8,610,353
Issue date
Dec 17, 2013
Tokyo Electron Limited
Hitoshi Itoh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Dry cleaning method of substrate processing apparatus
Patent number
8,562,751
Issue date
Oct 22, 2013
Tokyo Electron Limited
Isao Gunji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
8,551,565
Issue date
Oct 8, 2013
Tokyo Electron Limited
Isao Gunji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Metal oxide film formation method and apparatus
Patent number
8,354,337
Issue date
Jan 15, 2013
Tokyo Electron Limited
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, semiconductor manufac...
Patent number
8,349,725
Issue date
Jan 8, 2013
Tokyo Electron Limited
Hiroshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
8,314,004
Issue date
Nov 20, 2012
Tokyo Electron Limited
Kenji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method and apparatus, and storage medium
Patent number
8,268,396
Issue date
Sep 18, 2012
Tokyo Electron Limited
Hitoshi Itoh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, semiconductor device,...
Patent number
8,247,321
Issue date
Aug 21, 2012
Tokyo Electron Limited
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
8,242,015
Issue date
Aug 14, 2012
Tokyo Electron Limited
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
8,124,492
Issue date
Feb 28, 2012
Tokyo Electron Limited
Kenji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor device
Patent number
8,119,510
Issue date
Feb 21, 2012
Tokyo Electron Limited
Hiroshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film formation method and apparatus
Patent number
8,029,856
Issue date
Oct 4, 2011
Tokyo Electron Limited
Hidenori Miyoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING CONDUCTIVE FILM
Publication number
20150056381
Publication date
Feb 26, 2015
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
Masaru Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MICROWAVE WAVEGUIDE APPARATUS, PLASMA PROCESSING APPARATUS AND PLAS...
Publication number
20140251955
Publication date
Sep 11, 2014
National University Corporation Nagoya University
Hitoshi Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PR...
Publication number
20140008326
Publication date
Jan 9, 2014
National University Corporation Nagoya University
Hirotaka TOYODA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20130344703
Publication date
Dec 26, 2013
TOKYO ELECTRON LIMITED
Masahiro SHIMIZU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
FILM FORMING METHOD AND PROCESSING SYSTEM
Publication number
20130136859
Publication date
May 30, 2013
TOKYO ELECTRON LIMITED
Kenji Matsumoto
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20130017328
Publication date
Jan 17, 2013
TOKYO ELECTRON LIMITED
Hidenori MIYOSHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DRY CLEANING METHOD OF SUBSTRATE PROCESSING APPARATUS
Publication number
20120180811
Publication date
Jul 19, 2012
Central Glass Company, Limited
Isao GUNJI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, PRETREATMENT DEVICE, AND PROCESSING SYSTEM
Publication number
20120135612
Publication date
May 31, 2012
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20120122289
Publication date
May 17, 2012
TOKYO ELECTRON LIMITED
Kenji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATING APPARATUS, PLASMA PROCESSING APPARATUS AND PLASMA...
Publication number
20120068603
Publication date
Mar 22, 2012
National University Corporation Nagoya University
Hitoshi ITOH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR MANUFAC...
Publication number
20110237066
Publication date
Sep 29, 2011
TOKYO ELECTRON LIMITED
Hiroshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS-GAS SUPPLY AND PROCESSING SYSTEM
Publication number
20110139272
Publication date
Jun 16, 2011
TOKYO ELECTRON LIMITED
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
Publication number
20110049718
Publication date
Mar 3, 2011
TOKYO ELECTRON LIMITED
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL OXIDE FILM FORMATION METHOD AND APPARATUS
Publication number
20100323512
Publication date
Dec 23, 2010
TOKYO ELECTRON LIMITED
Kenji Matsumoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20100316799
Publication date
Dec 16, 2010
TOKYO ELECTRON LIMITED
Isao Gunji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20100233865
Publication date
Sep 16, 2010
TOKYO ELECTRON LIMITED
Kenji Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20100210097
Publication date
Aug 19, 2010
TOKYO ELECTRON LIMITED
Hiroshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20100140802
Publication date
Jun 10, 2010
TOKYO ELECTRON LIMITED
Kenji MATSUMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND APPARATUS, AND STORAGE MEDIUM
Publication number
20100015334
Publication date
Jan 21, 2010
TOKYO ELECTON LIMITED
Hitoshi ITOH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMATION METHOD AND APPARATUS
Publication number
20080000416
Publication date
Jan 3, 2008
TOKYO ELECTRON LIMITED
Hidenori Miyoshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...