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Hitoshi Jimba
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Tokyo, JP
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last 30 patents
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Patent Grant
Method of depositing titanium nitride thin film and CVD deposition...
Patent number
6,471,781
Issue date
Oct 29, 2002
Anelva Corporation
Ryoki Tobe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing titanium nitride thin film and CVD deposition...
Patent number
6,080,446
Issue date
Jun 27, 2000
Anelva Corporation
Ryoki Tobe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Titanium nitride film-MOCVD method incorporating use of tetrakisdia...
Patent number
5,672,385
Issue date
Sep 30, 1997
Anelva Corporation
Hitoshi Jimba
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...