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DEPOSITION METHOD AND DEPOSITION APPARATUS
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Publication number 20230230817
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Publication date Jul 20, 2023
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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PLASMA PROCESSING APPARATUS
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Publication number 20220230852
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Publication date Jul 21, 2022
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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H01 - BASIC ELECTRIC ELEMENTS
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ANTENNA AND PLASMA PROCESSING APPARATUS
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Publication number 20220223375
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Publication date Jul 14, 2022
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION APPARATUS AND DEPOSITION METHOD
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Publication number 20220223463
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Publication date Jul 14, 2022
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION APPARATUS AND DEPOSITION METHOD
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Publication number 20210087684
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Publication date Mar 25, 2021
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TOKYO ELECTRON LIMITED
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Yu SASAKI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING METHOD
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Publication number 20200234997
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Publication date Jul 23, 2020
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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H01 - BASIC ELECTRIC ELEMENTS
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CLEANING METHOD AND FILM DEPOSITION METHOD
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Publication number 20200141001
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Publication date May 7, 2020
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION METHOD
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Publication number 20200017968
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Publication date Jan 16, 2020
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20190382894
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Publication date Dec 19, 2019
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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FILM FORMATION TIME SETTING METHOD
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Publication number 20190203355
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Publication date Jul 4, 2019
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUSCEPTOR CLEANING METHOD
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Publication number 20190194803
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Publication date Jun 27, 2019
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film Formation Apparatus
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Publication number 20190186004
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Publication date Jun 20, 2019
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS
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Publication number 20180334745
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Publication date Nov 22, 2018
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TOKYO ELECTRON LIMITED
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Hitoshi KATO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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