Hitoshi Katoh

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor processing system including vaporizer and method for...
- Patent number 9,159,548
- Issue date Oct 13, 2015
- Tokyo Electron Limited
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removal of metal contaminant deposited on quartz member of vertical...
- Patent number 8,298,341
- Issue date Oct 30, 2012
- Tokyo Electron Limited
- Hitoshi Katoh
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
CVD method and device for forming silicon-containing insulation film
- Patent number 7,125,812
- Issue date Oct 24, 2006
- Tokyo Electron Limited
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING SYSTEM INCLUDING VAPORIZER AND METHOD FOR...
- Publication number 20140080320
- Publication date Mar 20, 2014
- TOKYO ELECTRON LIMITED
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVAL OF METAL CONTAMINANT DEPOSITED ON QUARTZ MEMBER OF VERTICAL...
- Publication number 20090293908
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Hitoshi KATOH
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Semiconductor processing system including vaporizer and method for...
- Publication number 20090186479
- Publication date Jul 23, 2009
- TOKYO ELECTRON LIMITED
- Tsuneyuki Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cvd method and device for forming silicon-containing insulation film
- Publication number 20050095770
- Publication date May 5, 2005
- Takeshi Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...