Hitoshi Kikuchi

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 11,656,126
- Issue date May 23, 2023
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and temperature control method
- Patent number 10,533,896
- Issue date Jan 14, 2020
- Tokyo Electron Limited
- Kazuteru Obara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement apparatus, method of measuring temperature...
- Patent number 9,002,674
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Masayuki Moroi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature measurement apparatus, method of estimating temperature...
- Patent number 8,992,079
- Issue date Mar 31, 2015
- Tokyo Electron Limited
- Masayuki Moroi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Heat Treatment Apparatus and Temperature Control Method
- Publication number 20200080895
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND TEMPERATURE CONTROL METHOD
- Publication number 20160379897
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Kazuteru OBARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE EJECTION DETECTION DEVICE, METHOD OF DETECTING SUBSTRATE...
- Publication number 20140345523
- Publication date Nov 27, 2014
- TOKYO ELECTRON LIMITED
- Hitoshi KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT APPARATUS, METHOD OF ESTIMATING TEMPERATURE...
- Publication number 20130130187
- Publication date May 23, 2013
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE...
- Publication number 20120303313
- Publication date Nov 29, 2012
- TOKYO ELECTRON LIMITED
- Masayuki MOROI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...