Hitoshi Kitagawa

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thermal type mass flow meter, and thermal type mass flow control de...
- Patent number 8,219,329
- Issue date Jul 10, 2012
- Horiba Stec, Co., Ltd.
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor fabrication system, and flow rate correction method a...
- Patent number 7,682,843
- Issue date Mar 23, 2010
- Tokyo Electron Limited
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THERMAL TYPE MASS FLOW METER, AND THERMAL TYPE MASS FLOW CONTROL DE...
- Publication number 20110125445
- Publication date May 26, 2011
- Hiroyuki Ebi
- G05 - CONTROLLING REGULATING
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM, AND FLOW RATE CORRECTION METHOD A...
- Publication number 20090061541
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Liquid material evaporation supply apparatus
- Publication number 20030217697
- Publication date Nov 27, 2003
- Hideaki Miyamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...