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ELECTROSTATIC CHUCK DEVICE
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Publication number 20200343125
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Publication date Oct 29, 2020
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Sumitomo Osaka Cement Co., Ltd.
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Yuuki KINPARA
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20190019714
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Publication date Jan 17, 2019
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Sumitomo Osaka Cement Co., Ltd.
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Mamoru KOSAKAI
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20180308737
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Publication date Oct 25, 2018
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Sumitomo Osaka Cement Co., Ltd.
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Yoshiaki MORIYA
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20180269097
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Publication date Sep 20, 2018
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Sumitomo Osaka Cement Co., Ltd.
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Shinichi MAETA
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20170287764
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Publication date Oct 5, 2017
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Sumitomo Osaka Cement Co., Ltd.
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Hitoshi KOUNO
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H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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ELECTROSTATIC CHUCK DEVICE
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Publication number 20170243778
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Publication date Aug 24, 2017
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Sumitomo Osaka Cement Co., Ltd.
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Hitoshi KOUNO
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK APPARATUS
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Publication number 20150179492
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Publication date Jun 25, 2015
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TOKYO ELECTRON LIMITED
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Yasuharu Sasaki
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK APPARATUS
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Publication number 20120281334
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Publication date Nov 8, 2012
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SUMITOMO OSAKA CEMENT CO., LTD.
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Yasuharu Sasaki
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H01 - BASIC ELECTRIC ELEMENTS