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Hitoshi Mashio
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Takasaki, JP
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last 30 patents
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Patent Grant
Process for preparing polymer compound for resist
Patent number
6,653,418
Issue date
Nov 25, 2003
Gun EI Chemical Industry Co., Ltd.
Katsuhiro Maruyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...