Hitoshi Morisaki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Silicon nitride film forming method
- Patent number 7,704,556
- Issue date Apr 27, 2010
- Canon Anelva Corporation
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Silicon Nitride Film Forming Method
- Publication number 20080020140
- Publication date Jan 24, 2008
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon nitride film forming apparatus and film forming method
- Publication number 20030198743
- Publication date Oct 23, 2003
- Hitoshi Morisaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...