Membership
Tour
Register
Log in
Hitoshi NAGANO
Follow
Person
Hiratsuka-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Laser apparatus for generating extreme ultraviolet light
Patent number
11,477,877
Issue date
Oct 18, 2022
Gigaphoton Inc.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,764,986
Issue date
Sep 1, 2020
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method for generating extreme ultraviolet light employin...
Patent number
10,512,148
Issue date
Dec 17, 2019
Gigaphoton Inc.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
10,314,152
Issue date
Jun 4, 2019
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
9,510,433
Issue date
Nov 29, 2016
Gigaphoton Inc.
Shinji Nagai
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation apparatus
Patent number
8,872,142
Issue date
Oct 28, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Extreme ultraviolet light generation system
Patent number
8,624,208
Issue date
Jan 7, 2014
Gigaphoton Inc.
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target supply apparatus
Patent number
8,604,451
Issue date
Dec 10, 2013
Gigaphoton Inc.
Takayuki Yabu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20200068695
Publication date
Feb 27, 2020
Gigaphoton Inc.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LASER APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20170196072
Publication date
Jul 6, 2017
GIGAPHOTON INC.
Hitoshi Nagano
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170064800
Publication date
Mar 2, 2017
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20170055336
Publication date
Feb 23, 2017
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20150008345
Publication date
Jan 8, 2015
Gigaphoton Inc.
Shinji NAGAI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT
Publication number
20140203194
Publication date
Jul 24, 2014
GIGAPHOTON INC.
Hitoshi Nagano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
Publication number
20120223257
Publication date
Sep 6, 2012
GIGAPHOTON, INC.
Shinji NAGAI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20110226745
Publication date
Sep 22, 2011
Shinji Nagai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
TARGET SUPPLY APPARATUS
Publication number
20100213272
Publication date
Aug 26, 2010
Takayuki YABU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR