Hitoshi NAKAGAWA

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,064,913
- Issue date Jun 23, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi Nakagawa
- F22 - STEAM GENERATION

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20140206204
- Publication date Jul 24, 2014
- Hitachi Kokusai Electric Inc.
- Hitoshi NAKAGAWA
- H01 - BASIC ELECTRIC ELEMENTS