Hitoshi Saito

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Patents Applicationslast 30 patents

Information Patent Application
Inductively-Coupled Plasma Processing Apparatus
- Publication number 20200227236
- Publication date Jul 16, 2020
- TOKYO ELECTRON LIMITED
- Hitoshi SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20050241769
- Publication date Nov 3, 2005
- TOKYO ELECTRON LIMITED
- Tsutomu Satoyoshi
- H01 - BASIC ELECTRIC ELEMENTS