Hitoshi Sunaoshi

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Kanagawa-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,836,319
- Issue date Dec 28, 2004
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,781,680
- Issue date Aug 24, 2004
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and chamber of charged particle beam s...
- Patent number 6,617,592
- Issue date Sep 9, 2003
- Kabushiki Kaisha Toshiba
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system adjusting method for energy beam apparatus
- Patent number 6,606,149
- Issue date Aug 12, 2003
- Kabushiki Kaisha Toshiba
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam optical element charged particle beam exposur...
- Patent number 6,028,317
- Issue date Feb 22, 2000
- Kabushiki Kaisha Toshiba
- Ken-ichi Murooka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of evaluating shaped beam of charged beam writer and method...
- Patent number 5,843,603
- Issue date Dec 1, 1998
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Optical system adjusting method for energy beam apparatus
- Publication number 20040190006
- Publication date Sep 30, 2004
- KABUSHIKI KAISHA TOSHIBA
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam system and chamber of charged particle beam s...
- Publication number 20010025931
- Publication date Oct 4, 2001
- Jun Takamatsu
- H01 - BASIC ELECTRIC ELEMENTS