Ho Kap Ahn

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Anseong-city, KR

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Patents Applicationslast 30 patents

Information Patent Application
Substrate holder having electrostatic chuck and method of fabricati...
- Publication number 20060016554
- Publication date Jan 26, 2006
- KoMiCo LTD.
- Ho Kap Ahn
- H01 - BASIC ELECTRIC ELEMENTS