Ho-Ta CHUANG

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Zhubei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
High density plasma reactor with multiple top coils
- Patent number 9,607,809
- Issue date Mar 28, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Ching Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH DENSITY PLASMA REACTOR WITH MULTIPLE TOP COILS
- Publication number 20140273537
- Publication date Sep 18, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chi-Ching LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...