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LOAD LOCK FAST PUMP VENT
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Publication number 20230335414
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Publication date Oct 19, 2023
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BROOKS AUTOMATION US, LLC
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Christopher HOFMEISTER
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20210175096
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Publication date Jun 10, 2021
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Brooks Automation, Inc.
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Christopher HOFMEISTER
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20200126820
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Publication date Apr 23, 2020
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Brooks Automation, Inc.
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Christopher HOFMEISTER
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20180226280
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Publication date Aug 9, 2018
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Brooks Automation, Inc.
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Christopher HOFMEISTER
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20180114708
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Publication date Apr 26, 2018
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Brooks Automation, Inc.
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Christopher HOFMEISTER
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK CHAMBER
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Publication number 20140178157
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Publication date Jun 26, 2014
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Brooks Automation, Inc.
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Christopher Hofmeister
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20130078057
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Publication date Mar 28, 2013
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Brooks Automation, Inc.
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Christopher Hofmeister
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H01 - BASIC ELECTRIC ELEMENTS
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LOAD LOCK FAST PUMP VENT
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Publication number 20090016855
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Publication date Jan 15, 2009
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Brooks Automation, Inc.
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Christopher Hofmeister
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H01 - BASIC ELECTRIC ELEMENTS