Holger Schwekendiek

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Freising, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for detecting defects in wafer manufacturing
- Patent number 8,532,364
- Issue date Sep 10, 2013
- Texas Instruments Deutschland GmbH
- Alexander Urban
- G01 - MEASURING TESTING
Information Patent Grant
Method of monitoring the light integrator of a photolithography system
- Patent number 7,423,729
- Issue date Sep 9, 2008
- Texas Instruments Incorporated
- Alexander Urban
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR DETECTING DEFECTS IN WAFER MANUFACTURING
- Publication number 20100208980
- Publication date Aug 19, 2010
- Texas Instruments Deutschland GmbH
- Alexander Urban
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR IN-LINE MONITORING A LENS CONTROLLER OF A PHOTOLITHOGRAP...
- Publication number 20080002171
- Publication date Jan 3, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Holger Schwekendiek
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of monitoring the light integrator of a photolithography system
- Publication number 20060055908
- Publication date Mar 16, 2006
- Alexander Urban
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY