Holger Weigand

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system for EUV microlithography
- Patent number 9,304,400
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Michael Layh
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR EUV MICROLITHOGRAPHY
- Publication number 20110177463
- Publication date Jul 21, 2011
- Carl Zeiss SMT GMBH
- Michael Layh
- G02 - OPTICS