Hom-Chung Lin

Person

Taichung, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of monitoring tool
- Patent number 11,804,392
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery system for ion implanter
- Patent number 11,569,062
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tool monitoring device and method of monitoring tool
- Patent number 11,239,099
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fault detection method in semiconductor fabrication facility
- Patent number 11,056,365
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- G01 - MEASURING TESTING
Information Patent Grant
Arc chamber filament for ion implanter
- Patent number 6,787,781
- Issue date Sep 7, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-centering device for mechanical clamp
- Patent number 6,767,407
- Issue date Jul 27, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Fu Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for detecting tilt angle of a wafer platform
- Patent number 6,737,663
- Issue date May 18, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MONITORING TOOL
- Publication number 20240021453
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MONITORING TOOL
- Publication number 20220130697
- Publication date Apr 28, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEM FOR ION IMPLANTER
- Publication number 20210366690
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL MONITORING DEVICE AND METHOD OF MONITORING TOOL
- Publication number 20200105555
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FAULT DETECTION METHOD IN SEMICONDUCTOR FABRICATION FACILITY
- Publication number 20190096723
- Publication date Mar 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung LIN
- G08 - SIGNALLING
Information Patent Application
Apparatus and method for detecting tilt angle of a wafer platform
- Publication number 20030218144
- Publication date Nov 27, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hom-Chung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Auto-centering device for mechanical clamp
- Publication number 20030209325
- Publication date Nov 13, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Fu Yu
- H01 - BASIC ELECTRIC ELEMENTS

Hom-Chung Lin

Person

Patents Grantslast 30 patents

Method of monitoring tool

Gas delivery system for ion implanter

Tool monitoring device and method of monitoring tool

Fault detection method in semiconductor fabrication facility

Arc chamber filament for ion implanter

Auto-centering device for mechanical clamp

Apparatus and method for detecting tilt angle of a wafer platform

Patents Applicationslast 30 patents

METHOD OF MONITORING TOOL

METHOD OF MONITORING TOOL

GAS DELIVERY SYSTEM FOR ION IMPLANTER

TOOL MONITORING DEVICE AND METHOD OF MONITORING TOOL

FAULT DETECTION METHOD IN SEMICONDUCTOR FABRICATION FACILITY

Apparatus and method for detecting tilt angle of a wafer platform

Auto-centering device for mechanical clamp