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Caotun Zhen, TW
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last 30 patents
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Patent Grant
Mechanisms for wafer cleaning
Patent number
9,349,617
Issue date
May 24, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Shang-Yuan Yu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
MECHANISMS FOR WAFER CLEANING
Publication number
20150144159
Publication date
May 28, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Shang-Yuan YU
H01 - BASIC ELECTRIC ELEMENTS